[20a-C103-1~11] 6.4 Thin films and New materials

[20a-C103-1] Room-Temperature Deposition of a Crystallized YSZ Film on Glass Covered with CNP

〇Susumu Horita¹, Hitomi Yagyu², Masaya Nogi² (1.JAIST, 2.Osaka Univ. ISIR)

Keywords:cellulose nanopaper, yttria-stabilized zirconia, sputtering

For fabrication of poly-Si TFT on a cellulose nanopaper(CNP), we deposited a YSZ film, which acts as crystallization-induction, on CNP/Glass by sputtering. It is important to deposit the YSZ film without heat damage of CNP. Generally, lowering sputtering power for reducing heat damage to a substrate brings deposition of a non-crystallized film. So, we tried to insert thermal compound between the substrate covered with CNP and a sample holder in order to make smooth heat flow outward. As a result, we obtained a crystallized YSZ film without heat damage to CNP, even using high sputtering power.