The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C103-1~11] 6.4 Thin films and New materials

Tue. Mar 20, 2018 9:00 AM - 12:00 PM C103 (52-103)

Akifumi Matsuda(Titech)

11:15 AM - 11:30 AM

[20a-C103-9] Observation of RHEED oscillation of metal thin films deposited by sputtering method

〇Taisuke Ojima1, Hideto Yanagihara1 (1.Univ. of Tsukuba)

Keywords:sputtering method, Reflectron high-energy electron diffraction (RHEED), layer-by-layer growth