[20a-P1-1~11] 3.7 Laser processing

△ [20a-P1-4] Evaluation of electrical properties of femtosecond laser irradiation modified layer at interface between Ni and SiC using Hall measurement

〇Hiroki Kawakami¹, Yoshiki Naoi¹, Takuro Tomita¹ (1.Tokushima Univ.)

Keywords:ohmic electrode, femtosecond laser