[20a-P1-1~11] 3.7 Laser processing

[20a-P1-6] Holographic ultraviolet laser processing

〇Ryo Onoda¹, Satoshi Hasegawa¹, Yoshio Hayasaki¹ (1.CORE)

Keywords:laser processing

Ultraviolet laser processing using femtosecond second harmonic has theoretically reduced the condensed beam diameter by half compared with near-infrared laser processing based on femtosecond fundamental wave, so it enables finer processing. In addition, since the intermolecular bond is directly dissociated via electron excitation by high photon energy, heat effect is reduced.
In this report, processing using ultraviolet laser was performed. In addition, in order to improve the processing speed, multi-point simultaneous processing by computer-generated hologram was performed.