[20a-P2-1~17] 3.8 Optical measurement, instrumentation, and sensor

[20a-P2-11] Proposal of flaw detection technique on metal surface using phase type diffraction gratings

〇(M2)Takuma Ogawa¹, Akira Emoto¹, Takashi Fukuda² (1.Doshisha Univ., 2.AIST)

Keywords:Diffraction gratings, flaw detection technology

Conventionally, a method of evaluating flaws on a metal surface based on visual observation by a worker or a method of photographing a multi-viewpoint image are used. However, there are problems in these methods such that the quality cannot be kept constant or it takes time to process the multi-view images. In this research, we propose a detection technique for separating flaws and surface roughness by employing phase type diffraction gratings. As a result, it was confirmed that fine unevenness on the surface was suppressed, and that a large flaw was enhanced.