[20a-P2-1~17] 3.8 Optical measurement, instrumentation, and sensor

[20a-P2-6] A common-path phase-shifting interference-microscope using RGB lasers

〇Jun Chen¹, Masateru Hiramatsu¹, Junji Endo² (1.Tokyo Polytech. Univ., 2.FK Optics Lab.)

Keywords:phase-shifting interferometry, interference microscope, multiwavelength

A near-common-path phase-shifting interference microscope using RGB three-color lasers is presented. In this system, laser beams from three DPSS lasers are combined using a fiber multiplexer and then used as a quasi-white light source. This system enables us to measure the dispersion of the sample under the test. Experimental results for measurement of polarization maintaining fiber with three laser sources are shown.