[20a-P4-1~10] 3.15 Silicon photonics

[20a-P4-2] Design of a silicon polarization grating by form birefringence

〇Shigeaki Sakai¹, Koji Anju¹, Hiroyuki Tsuda¹ (1.Keio Univ)

Keywords:polarization grating

Polarized gratings are attracting attention because they can realize a high efficiency and a large diffraction angle. Generally, polarizationgrating is formed utilizing the anisotropy of liquid crystal molecules. However, when it is used for optical communication, it is preferable to use an inorganic material rather than an organic material because reliability such as light resistance, heat resistance and moisture resistance is required. Therefore, we found a structure that realizes a half wave plate by giving structural birefringence to the surface of the silicon substrate, and designed a polarized diffraction grating based on this half wave plate.