Fabrication and evaluation of Ta<sub>2</sub>O<sub>5</sub> thin films by RF Sputtering

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Tue. Mar 20, 2018 9:30 AM - 11:30 AM P5 (P)

9:30 AM - 11:30 AM

〇Yutaro Umemori¹, Takanori Takahashi¹, Kiyoshi Uchiyama¹ (1.National Institute of Technology, Tsuruoka College)

Keywords:TFT, Ta2O5 thin films