[20a-P5-1~11] 6.1 Ferroelectric thin films

[20a-P5-8] Deposition of lead-free ferroelectric film in the low humidity environment

〇Jun Hirade¹, Masaki Yamaguchi¹, Yoichiro Masuda² (1.Shibaura Inst., 2.Hachinohe Inst.)

Keywords:ferroelectrics, Bismuth titanate

Lead-free ferroelectric materials are expected to be applied as MEMS devices and energy harvesters. In order to reproduce the crystallized film, a trace amount of water vapor in the atmosphere dissolves into the organometallic decomposition solution. In this study, the solution was stirred under a low humidity environment. Then, the effect of the surrounding environment on stirring the solution was investigated, as compared with the film formed by the solution in which the film quality after film formation was stirred in the atmosphere. From the X - ray diffraction results, it was found that the amount of water vapor in the atmosphere adversely affects the crystallization of the film.