[20a-P7-1~37] 12.1 Fabrications and Structure Controls

[20a-P7-2] Measurement of incident molecular temperature in the formation of organic thin films

Takahiro Abe¹, 〇Yukihiro Ozaki¹, Munetaka Hayakawa², Akihumi Shimoyama², Takaaki Tanaka², Akira Tsuji², Yoshikazu Takahashi³, Ryosuke Matsubara¹, Atsushi Kubono¹ (1.Shizuoka Univ., 2.KOJIMA INDUSTRIES CORPORATION., 3.TI Corporation.)

Keywords:organic thin film, formation of thin films, thermal accommodation