[20a-P7-1~37] 12.1 Fabrications and Structure Controls

[20a-P7-9] In-situ observation of thin film formation during vapor deposition polymerization by simultaneous measurement using IR and QCM techniques.

〇Keita Nonaka¹, Takaaki Tanaka², Akira Tsuji², Ryosuke Matsubara¹, Atsushi Kubono¹ (1.Shizuoka Univ., 2.KOJIMA INDUSTRIES CORPORATION)

Keywords:Vapor deposition polymerization, Polyurea, in-situ

Vapor deposition polymerization is utilized for the preparation of polymer thin films on the basis of the conventional vacuum vapor deposition technique. Although various polymer thin films can be formed by this method, the formation process of thin films is still unknown in some parts. In this study, simultaneous measurement using an infrared spectrometer and a quartz crystal microbalance was conducted to elucidate the elementary processes in vapor deposition polymerization.