[20a-P9-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[20a-P9-1] Anti-reflection structure for ultra-high-efficiency Nano-pillar Array Si Solar Cells

〇Masatoshi Morishita¹, Keiji Watanabe¹, Tetsufumi Kawamura¹, Wei Sun¹, Taro Osabe¹ (1.Hitachi Ltd.)

Keywords:solar cells, silicon, anti reflection

We proposed the nano pillar array with stacked layers to achieve the quantum confinement and the low reflectance of the incident light at the same time for the ultra-high-efficiency Si solar cells. The minimum reflectance was calculated to be 2% with NP array using SiO2/SiN two-stacked layers(no electrode). We achieve 2.5%(no electrode) with experimental production. This result corresponds to 6.1% with electrode, which is lower than inversed pyramid with aniti-reflection layer.