[20p-B301-1~13] 7.1 X-ray technologies

[20p-B301-5] Tender X-ray emission spectroscopy employing a flat-field grating spectrograph

〇Takashi Imazono¹, Hiroaki Nishiharah², Ryuichi Ukita², Hiroyuki Sasai², Tetsuya Nagano² (1.QST, 2.Shimadzu Corp.)

Keywords:Multilayer grating, Tender-X-ray emission spectroscopy, CIGS solar cell

Tender X-ray emission spectroscopy was performed by using a flat-field spectrograph equipped with a wideband Ni/C multilayer grating, and we succeeded in measuring highly-resolved Lα_1,2 and Lβ₁ lines simultaneously from the absorber (Cu, In, Ga, and Se) and electrodes (Zn and Mo) in a CIGS solar cell, (e.g., resulting in 4.6 eV FWHM at the Ga-Lα_1,2 line). This indicates that our spectrograph can be used for wideband high-resolution spectroscopy in tender X-ray region