[20p-B401-1~12] 7.3 微細パターン・微細構造形成技術

▲ [20p-B401-10] Direct Imprinting and Electrical Properties of ITO Precursor Gel

〇(D)Puneet Jain¹、Kenichi Haga¹、Eisuke Tokumitsu¹ (1.JAIST)

キーワード：Direct thermal Imprinting, Indium Oxide

nano-Rehology (n-RP) is a direct thermal imprinting technique and deforms oxide precursor gel without photoresist. n-RP enables the deformation of sub-100 nm patterns by utilizing the rheological properties of an oxide precursor gel. In this work, we study how addition of tin (Sn) to pure indium oxide (In2O3), affects the direct imprinting and electrical properties of pure In2O3.