[20p-B401-1~12] 7.3 Micro/Nano patterning and fabrication

△ [20p-B401-5] Nanometer-Resolved Fluidity of an Oleophilic Monomer between Silica Surfaces Modified with a Reactive Adhesive Layer

〇Shunya Ito¹, Motohiro Kasuya¹, Kazue Kurihara², Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ., 2.NICHe, Tohoku Univ.)

Keywords:UV nanoimprinting, reactive adhesive layer, increase in monomer viscosity

We previously reported that, in terms of an oleophilic monomer of 1,10-decanediol diacrylate (AC10) with a bulk viscosity of 10 mPa·s, the viscosity of AC10 began to increase at surface-surface distances D ≤ 6 nm between hydrophilic unmodified silica surfaces. We think that the increase in the viscosity between mold and substrate surfaces would make alignment process difficult in UV nanoimprinting. In this study, we investigated nanometer-resolved fluidity of AC10 between silica surfaces modified with a reactive adhesive monolayer by surface forces and resonance shear measurements in order to understand fundamental effect of the adhesion layer on the monomer viscosity.