[20p-C202-1~7] 17.3 Layered materials

[20p-C202-2] Characterization of molybdenum disulfide (MoS₂) thin films fabricated by mist CVD

〇(D)Shota Sato¹, Masahito Sakamoto², Noriko Nitta^3,4, Li Liu¹, E. K. C. Pradeep⁴, Giang T. Dang⁴, Toshiyuki Kawaharamura^1,2,4 (1.Kochi Univ. of Technol. Eng. course, 2.Intelligent Mech. Sys. Eng, 3.Mater. Sci. and Eng. course, 4.Res. Inst.)

Keywords:mist CVD, MoS2