The 65h JSAP Spring Meeting, 2018

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[20p-C303-1~11] 3.8 Optical measurement, instrumentation, and sensor

Tue. Mar 20, 2018 1:45 PM - 4:45 PM C303 (52-303)

Toshihiro Somekawa(Inst. for Laser Tech.), Yasunori Saito(Shinshu Univ.)

3:00 PM - 3:15 PM

[20p-C303-6] Laser Displacement Sensor for MEMS to Measure Piconewton Forces

〇(D)Masanobu Shigaki1, Yoshito Tanaka1,2, Takaaki Sato1, Tsutomu Shimura1 (1.IIS, the Univ. of Tokyo, 2.JST PRESTO)

Keywords:MEMS, laser displacement sensor

Measuring piconewton forces is required for not only physics but also biometry. With regard to a field of MEMS, a weak force measurement through a displacement measurement by a laser Doppler vibrometer has just a force detection sensitivity of sub-nanonewton order. Thus, we develop a laser displacement sensor, to which a principle of Michelson interferometer is applied, to measure a displacement generated by a force of sub-piconewton order.