[20p-C303-1~11] 3.8 Optical measurement, instrumentation, and sensor

△ [20p-C303-6] Laser Displacement Sensor for MEMS to Measure Piconewton Forces

〇(D)Masanobu Shigaki¹, Yoshito Tanaka^1,2, Takaaki Sato¹, Tsutomu Shimura¹ (1.IIS, the Univ. of Tokyo, 2.JST PRESTO)

Keywords:MEMS, laser displacement sensor

Measuring piconewton forces is required for not only physics but also biometry. With regard to a field of MEMS, a weak force measurement through a displacement measurement by a laser Doppler vibrometer has just a force detection sensitivity of sub-nanonewton order. Thus, we develop a laser displacement sensor, to which a principle of Michelson interferometer is applied, to measure a displacement generated by a force of sub-piconewton order.