The 65h JSAP Spring Meeting, 2018

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22 Joint Session M » 22.1 Joint Session M "Phonon Engineering"

[20p-C304-1~15] 22.1 Joint Session M "Phonon Engineering"

Tue. Mar 20, 2018 12:45 PM - 5:00 PM C304 (52-304)

Takanobu Watanabe(Waseda Univ.), Takahiro Yamamoto(Tokyo Univ. of Sci.), Takao Mori(NIMS)

4:30 PM - 4:45 PM

[20p-C304-14] Thermal transport properties of ALD-Al2O3 film

〇Yuta Nakajima1, Noriyuki Uchida2, Yuji Ohishi3, Ryuto Machida1, Hiroki Fujishiro1, Junichi Hattori2, Kouichi Fukuda2, Tasturo Maeda2 (1.Tokyo University of Science, 2.AIST, 3.Osaka Univ.)

Keywords:semiconductor, phonon transport