[20p-P4-1~40] 8 Plasma Electronics（Poster）

[20p-P4-1] Numerical Investigation of Waveguide for Linear Microwave Plasma

〇Shoma Miya¹, Takanori Kameyama¹, Michiaki Utsumi¹, Shuji Kuwahata¹, Masao Isomura¹, Haruo Shindo² (1.Tokai Univ., 2.Plasma Research Lab.)

Keywords:Microwave Plasma, Waveguide