Uniformity of DLC thin films prepared by VHF plasma with supersonic jet

Presentation information

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster）

Tue. Mar 20, 2018 1:30 PM - 3:30 PM P4 (P)

1:30 PM - 3:30 PM

〇Ryo Oishi¹, Shota Yamamoto¹, Joji Kichise¹, Hidetaka Sakamoto¹, Rintaro Hayata¹, Hiroshi Muta¹ (1.Kindai Univ.)

Keywords:DLC thin films