[20p-P4-1~40] 8 Plasma Electronics（Poster）

[20p-P4-16] Influences of Substrate Surface Morphologies on Isolated Columnar Structures Fabricated by Glancing-angle Reactive Sputtering

〇(M1)Hiroki Izumisawa¹, Yasusi Inoue², Osamu Takai³ (1.Chiba Tech, 2.Chiba Tech, 3.Kanto Gakuin Univ.)

Keywords:Reactive Sputtering, Glancing-angle Deposition