[20p-P4-1~40] 8 Plasma Electronics（Poster）

[20p-P4-6] Analysis of Network Structures for Chemical Reactions in Silane Plasmas by Consideration of Reaction Rate

〇Yasutaka Mizui¹, Ryuta Tsukamoto¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1.Univ. of Shiga Pref.)

Keywords:network analysis, plasma