[20p-P6-1~29] 15.4 III-V-group nitride crystals

[20p-P6-7] Estimation of High-Temperature Contact Resistance in Ti/Al/Ti/Au ohmic metals on AlGaN/GaN Heterostructures

〇Tetsuo Makie¹, Yutaro Watanabe¹, Hiroshi Fujioka², Narihiko Maeda¹ (1.Tokyo Univ. of Technology, 2.Inst. of Industrial Science, the Univ. of Tokyo)

Keywords:semiconductor