Yuichiro Mitani

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:55 AM - 12:15 PM C212 (C212)

Symposium (Oral)
| Symposium (technical)
| Hydrogen in oxides and its role

[20a-C212-1~4] Hydrogen in oxides and its role

11:05 AM - 11:40 AM

[20a-C212-3] Influence of Hydrogen on Reliability in Si Devices

〇Yuichiro Mitani¹, Harumi Seki¹, Yasushi Nakasaki¹ (1.Toshiba Memory Corp.)