Toshinori Takahashi

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:00 AM - 12:15 PM E303 (E303)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18a-E303-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

9:15 AM - 9:30 AM

[18a-E303-2] Design and Verification of Water Flow in Batch-Type Silicon Wafer Wet Cleaner

〇Toshinori Takahashi¹, Miya Matsuo¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)