Yukihiro Shimogaki

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

1:30 PM - 2:00 PM

[20p-N304-1] Challenges for ALD process development and expectations for data science

〇Yukihiro Shimogaki¹ (1.The Univ. Tokyo)