Tadashi Mitsunari

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

2:30 PM - 3:00 PM

[20p-N304-3] The next generation way of the process control of the atomic layer deposition

〇Tadashi Mitsunari^1,2, Toshiki Sato¹, Yusuke Suzuki¹, Michitaka Kikuchi¹, Munehito Kagaya¹, Yoshinori Morisada¹, Hitoshi Yonemichi³, Hironori Moki³, Tsuyoshi Moriya¹ (1.Tokyo Electron Technology Solutions Ltd., 2.Center for Low-temperature plasma Sciences, 3.Tokyo Electron Ltd.)

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