Shunpei Kawai

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 10:00 AM - 11:45 AM E307 (E307)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-E307-1~6] 7.3 Micro/Nano patterning and fabrication

10:15 AM - 10:30 AM

[20a-E307-2] Improvement of Sensitivity of Chemically Amplified Resists upon Adding Diphenyl Sulfone Derivatives

〇(M2)Shunpei Kawai¹, Kazumasa Okamoto², Masato Ohnuma¹, Takahiro Kozawa² (1.Hokkaido Univ., 2.Osaka Univ.)