Hideaki Machida

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 3:30 PM PB2 (PB)

Poster presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[19p-PB2-1~7] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

1:30 PM - 3:30 PM

[19p-PB2-4] Novel liquid ALD precursor for ULSI cobalt interconnect

〇Hideaki Machida¹, Sudoh Hiroshi¹, Ishikawa Masato¹, Ohshita Yoshio² (1.Gas-Phase Growth, 2.Toyota Inst. Tech.)