Hironobu Nishida

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 4:00 PM - 6:00 PM PA7 (PA)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-PA7-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 6:00 PM

△ [20p-PA7-2] Evaluation of etching characteristicson titanium-assisted high-speed anisotropic chemical vapor etching of silicon dioxide

〇Hironobu Nishida¹, Shin'ichi Warisawa¹, Reo Kometani¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo)