Hironori Igarashi

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 3:30 PM - 7:00 PM E203 (E203)

Oral presentation
| 3 Optics and Photonics
| 3.5 Laser system and materials

[20p-E203-7~19] 3.5 Laser system and materials

5:30 PM - 5:45 PM

[20p-E203-14] Development of high peak power hybrid ArF excimer laser

〇Hironori Igarashi¹, Yuuki Tamaru¹, Chen Qu¹, Yasuhiro Kamba¹, Atsushi Fuchimukai¹, Yoshihiko Miura¹, Taisuke Miura¹, Junichi Fujimoto¹, Hakaru Mizoguchi¹ (1.Gigaphoton Inc.)

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