Takashi Ichikawa

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

△ [19a-E304-7] A Study on SCD Electrodes for Au-Proof-Mass 3-axis MEMS Accelerometer (2)

〇Takashi Ichikawa¹, Shota Otobe¹, Ken Atsumi¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Masato Sone¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

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