JAEYEON KIM

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 10:00 AM - 11:45 AM E307 (E307)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-E307-1~6] 7.3 Micro/Nano patterning and fabrication

10:30 AM - 10:45 AM

▲ [20a-E307-3] Improvement of Line-Edge Roughness on Pt-based Ultrafine Nanorods by Post-Exposure Bake

〇JAEYEON KIM¹, Ryo Toyama¹, Yutaka Majima¹ (1.Tokyo Institute of Technology)