Yuki Nakagomi

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 11:45 AM B11 (B11)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20a-B11-1~10] 8.1 Plasma production and diagnostics

10:30 AM - 10:45 AM

[20a-B11-6] Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy

〇(M1)Yuki Nakagomi¹, Tatsuya Watabe¹, Mutsuki Hirayama¹, Ryosuke Kaneyuki¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechinic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

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