Hideya Mizuno

→ Search for Hideya Mizuno in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E318 (E318)

Oral presentation
| Code-sharing session
| 【CS.7】 Code-sharing Session of 7.2 & 7.4 & 9.5

[19a-E318-1~12] 【CS.7】 Code-sharing Session of 7.2 & 7.4 & 9.5

11:30 AM - 11:45 AM

[19a-E318-10] Investigation of Non-Charging Exposure Condition in Electron Beam Lithography

〇Hideya Mizuno¹, Kento Kubo¹, Kentaro Kojima¹, Masatoshi Kotera¹ (1.OIT)