Toshiya Suzuki

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

2:30 PM - 2:45 PM

[19p-E305-4] Role of O₂ plasma on electrical characteristics improvement of ALD-deposited SiO₂ by microwave plasma

〇Toshiya Suzuki¹, Niklas Holm¹, Vaino Kilpi¹, Tom Blomberg¹ (1.Picosun Oy)