Takahiko Ikarashi

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:30 PM - 5:15 PM C310 (C310)

Oral presentation
| 6 Thin Films and Surfaces
| 6.6 Probe Microscopy

[18p-C310-1~14] 6.6 Probe Microscopy

4:00 PM - 4:15 PM

[18p-C310-10] Evaluation of the Surface Properties of a PVA Brush for Cleaning Semiconductor Wafer by AFM in Liquids.

〇Takahiko Ikarashi¹, Takumi Yoshino¹, Kazuki Miyata^1,2, Keisuke Miyazawa^1,2, Megumi Uno³, Chikako Takatoh³, Takeshi Fukuma^1,2 (1.Grad. School, Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA corp.)

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