Masaya Saito

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

△ [18a-E304-8] Solid-Phase Crystallization of As-doped Amorphous Ge on Glass Leading to High Electron Mobility

〇Masaya Saito¹, Kenta Moto¹, Takeshi Nishida¹, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba)