Takeshi Sakamoto

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:30 AM PA6 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18a-PA6-1~12] 8.1 Plasma production and diagnostics

9:30 AM - 11:30 AM

[18a-PA6-2] Verification of AlN⁺ production by a plasma sputter type ion source

〇Takeshi Sakamoto¹, Kasuya Toshiro¹, Wada Motoi¹ (1.Doshisha Univ.)