Shuhei Yamamoto

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E203 (E203)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20a-E203-1~12] 7.5 Ion beams

9:00 AM - 9:15 AM

[20a-E203-1] Crystal orientation dependence of sputtering yields and effect of channeling

〇(M2)Shuhei Yamamoto¹, Takanori Nagasaki¹, Masato Yoshino¹, Tomoaki Yamada¹ (1.Nagoya Univ.)