SungLin Tsai

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:45 PM - 5:45 PM E303 (E303)

Oral presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[20p-E303-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

2:30 PM - 2:45 PM

[20p-E303-4] Formation of AlScN film by sputtering

〇SungLin Tsai¹, Kazuki Kusafuka¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR)

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