Daisuke Matsuo

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PB5 (PB)

Poster presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 6:00 PM

[18p-PB5-33] Reliability of two-layer IGZO TFT by inductively coupled plasma sputtering

〇Daisuke Matsuo¹, Ryoko Miyanaga², Takuya Ikeda¹, Shigeaki Kishida¹, Yoshitaka Setogucti¹, Yasunori Andoh¹, Mami Fujii², Yukiharu Uraoka² (1.NISSIN ELECTRIC, 2.NAIST)

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