Toshikazu Yamada

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:00 PM - 6:00 PM N302 (N302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-N302-1~18] 13.7 Compound and power electron devices and process technology

3:00 PM - 3:15 PM

[18p-N302-8] Mg recoil implantation into GaN with incident Nitrogen ion (4)

〇Toshikazu Yamada¹, Hisashi YAMADA¹, Tokio TAKAHASHI¹, Mituaki SIMIZU¹ (1.National Institute of Advanced Industrial Science & Technology)