Atsushi Kanade

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[18p-PA4-1~25] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

[18p-PA4-6] Analysis of bonding states of a-CN_x:H thin flims produced from the microwave plasma CVD of the C₆H₆-N₂ gas mixtur

〇Atsushi Kanade¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech)