5:00 PM - 5:15 PM [20p-E312-13] The highly efficient p-type B doping into type IIa diamond substrate by 11B+ ion implantation at room temperature and subsequent annealing at 1150°C and 1300°C 〇Yuhei Seki1, Yasushi Hoshino1, Jyoji Nakata1 (1.Kanagawa Univ.)