[18a-C206-1~12] 1.6 Ultrasonics

△ [18a-C206-10] Analysis of Leaky Surface Acoustic Waves on Similar Material Bonded Structure for LiNbO₃

〇(M1)Takumi Fujimaki¹, Masashi Suzuki¹, Shoji Kakio¹ (1.Univ. of Yamanashi)

Keywords:Surface acoustic wave, Similar material bonded structure, LiNbO3

In this report, we investigated theoretically leaky surface acoustic waves characteristics on similar material bonded structures for LiNbO₃. The cut angle of the support substrate was optimized by using a thin plate of 10°YX-LN with the largest coupling factor (K²) among the rotated Y-cut substrates. As a result, zero attenuation for the free and metallized surfaces was obtained simultaneously.For instance, 10°YX-LN(0.75λ)/66.2°YX-LN structure was found to have zero attenuation and 19.2% of K².In addition, for FEM analysis of resonance property, resonance Q_r of 490,000, anti-resonance Q_a of 110,000, and fractional band width of 12.2% were obtained using the above structure..