[18a-C206-1~12] 1.6 Ultrasonics

△ [18a-C206-9] Analysis of leaky SAW on LiNbO₃/SiO₂/quartz structure

〇(M1)Shiori Asakawa¹, Junki Hayashi¹, Masashi Suzuki¹, Shoji Kakio¹, Ami Tezuka², Hiroyuki Kuwae², Jun Mizuno² (1.Univ. of Yamanashi, 2.Waseda Univ.)

Keywords:surface acoustic wave, leaky surface acoustic wave, broadband

In recent years, a structure of different bonded materials advantageous for realizing high performance of SAW devices has proposed. In particular, high coupling factor and stability of the temperature characteristics be expected with LiNbO₃ and the temperature compensation film SiO₂, respectively. In this study, to clarify the propagation and resonance properties of an LSAW on an amorphous layer inserted between an LN thin plate bonded to an quartz substrate were investigated. The bandwidth of 11.5% was obtained, TCF was reduced about 1/2 compared with single LN structure on the 27°YXLN/SiO₂/AT90°X-Q structure. The structure with higher coupling and lower TCF will be searched.