[18a-E303-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18a-E303-1] Temperature Influence on Adsorption and Desorption of Organic Molecules in Two Component System on Silicon Surface

Kenta Hori¹, 〇Tomohiko Kanai¹, Hitoshi Habuka¹ (1.Yokohama National Univ.)

Keywords:adsorption and desorption, organic molecules

When organic molecules adsorb/desorb on/from silicon surface at room temperature, the behavior is affected by a tiny temperature change. In two organic component system, the amount of adsorption sometimes changes irreversibly when the concentration of organic molecules changes. We investigated the irreversible adsorption and desorption behavior in diethyl phthalate(DEP)/l-menthon system at several temperature conditions.