11:00 AM - 11:15 AM
[18a-E304-7] Issues for the Crystallization of a-Si Films and TFTs on Panel
Keywords:amorphous Si, Thin Film, Crystallization
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)
Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)